Ceramic Wafer Chuck

By using ceramic materials flatnesses of less than 1 micron can be achieved.

Ceramic wafer chuck.

Photomachining offers a variety of porous vacuum chuck designs for use with thin films semiconductor wafers and other flat samples. Arc will design a wafer chuck to a customer s unique requirements and quote the finished product. Semixicon is based in the silicon valley serving world wide semiconductor photonics and medical etc industries with precision ceramic machining and assembly solutions with our core technology of wafer handling chuck tables. Our wafer chuck tables electrostatic chucks and heaters are virtually found in many semiconductor equipment in most of.

When the wafer is held on the chuck it elastically deforms to the chuck s conic shape thus ensuring that the grinding wheel only contacts half of the wafer at any given instant. The chuck has a pore size of less than 25 microns 60 microns optional assuring uniform suction and strong holding power for even the smallest parts. The shape of the ceramic chuck can be dressed to a conic shape with a very small angle see fig. Advanced ceramic vacuum wafer chucks materials developed specifically for wafer handling as a leader in technical ceramics for wafer processing equipment coorstek understands advanced semiconductor manufacturing and constantly develops new materials designs and processes to optimize yields and extend product life.

Porous ceramic vacuum chuck. With applications for the semiconductor industry ever diversifying so are the substrate and materials used to provide new products. Arc also manufactures custom chucks from a customer s drawing or solid model. Pared with ceramic the electrostatic force is 1 10 smaller and.

Shown on the right is a 6 inch diameter free standing porous ceramic chuck plate with pores size 20um 10. Heat transfer between the chuck and the wafer may be con sidered as the combination of contact point conduction heat. We are providing below ceramic chuck table products services new and refurbished porous ceramic chucks for disco adt k s applied materials tsk okamoto micro automation load point etc dicing saws and grinders 4 5 6 8 12 regular size available in round square oval shape or irregular shapes and sizes high precision of surface flatness of 2 micron custom chucks for dicing. Vacuum wafer chucks are used in the semiconductor industry to accurately position the wafer in the machine.